Field-Emission Scanning Electron Microscope (FE-SEM)

The FE-SEM allows for ultra-high resolution, particularly at low keV. It can differentiate chemistry, orientation, and topography of samples and provide high image quality. It is suitable for magnetic materials as well as phase identification and texture analysis. Features of the FEI Teneo LoVac include:

• Schottky field emitter: From 200 eV to 30 keV with beam current of 1 pA to 400 nA
• Resolution: 0.8 nm at 30 kV, 1.4 nm at 1 kV
• Novel Field Emission Electron Optics optimized for both high current and high resolution meeting all imaging and analysis needs
• Trinity detection system for fast imaging, and easy collection of all available signals
• Maximum horizontal field width: 4.0 mm (corresponds to 30× minimum magnification in quad view)
• A 110 mm stage tilts up to 90° and provides a long, eucentric working distance for greater flexibility in sample handling
• Oxford energy dispersive and backscattered electron detectors